High rate roll-to-roll atmospheric atomic layer deposition of Al2O3 thin films towards gas diffusion barriers on polymers
Ali, Kamran, Choi, Kyung-Hyun, Jo, Jeongdai, Lee, Yun WooVolume:
136
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2014.07.186
Date:
December, 2014
File:
PDF, 4.46 MB
english, 2014