Effects of TiN Deposition on the Characteristics of...

Journal of The Electrochemical Society 2001 Vol. 148; Iss. 9

Effects of TiN Deposition on the Characteristics of W/TiN/SiO[sub 2]/Si Metal Oxide Semiconductor Capacitors

Park, Dae-Gyu, Cho, Heung-Jae, Lim, Kwan-Yong, Cha, Tae-Ho, Yeo, In-Seok, Park, Jin Won
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1392322
File:
PDF, 193 KB
english, 2001
Conversion to is in progress
Conversion to is failed