An experimental study of sidewall adhesion in...

Journal of Microelectromechanical Systems 2005 / 12 Vol. 14; Iss. 6

An experimental study of sidewall adhesion in microelectromechanical systems

Timpe, S.J., Komvopoulos, K.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.859076
Date:
December, 2005
File:
PDF, 1.20 MB
english, 2005
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