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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Electrical Characteristics of Low-Temperature Poly-Silicon Thin-Film Transistor Using a Stacked Pr2O3/SiOxNy Gate Dielectric
Pan, Tung-Ming, Wu, Tin-Wei, Chan, Ching-Lin, Chen, Kai-Ming, Lee, Chih-HongVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911494
File:
PDF, 299 KB
english, 2008