Controlled Etching of InGaAlAs and GaAsSb Using Citric...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 12

Controlled Etching of InGaAlAs and GaAsSb Using Citric Acid∕Hydrogen Peroxide Mixtures

Lijadi, Melania, David, Christophe, Pelouard, Jean-Luc
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2103587
File:
PDF, 434 KB
english, 2005
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