Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon
Ahn, Chae Hyuck, Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Lee, Brian J., Flader, Ian, Kenny, Thomas W.Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2330590
Date:
April, 2015
File:
PDF, 4.08 MB
english, 2015