![](/img/cover-not-exists.png)
Ultra-thin free-standing single crystalline silicon membranes with strain control
Shchepetov, A., Prunnila, M., Alzina, F., Schneider, L., Cuffe, J., Jiang, H., Kauppinen, E. I., Sotomayor Torres, C. M., Ahopelto, J.Volume:
102
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4807130
File:
PDF, 1.18 MB
english, 2013