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Growth of two-dimensional arrays of silicon nanocrystals in thin SiO 2 layers by low pressure chemical vapour deposition and high temperature annealing/oxidation. Investigation of their charging properties
Salonidou, A, Nassiopoulou, A G, Giannakopoulos, K, Travlos, A, Ioannou-Sougleridis, V, Tsoi, EVolume:
15
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/15/9/021
Date:
September, 2004
File:
PDF, 613 KB
english, 2004