Self-Aligned Electrodes on SU-8 Negative Photoresist...

Journal of Microelectromechanical Systems 2014 / 6 Vol. 23; Iss. 3

Self-Aligned Electrodes on SU-8 Negative Photoresist Pedestals

Fok, H. Raymond, Jackson, Thomas N.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2313723
Date:
June, 2014
File:
PDF, 769 KB
english, 2014
Conversion to is in progress
Conversion to is failed