DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED...

Integrated Ferroelectrics 2005 / 11 Vol. 76; Iss. 1

DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED PIEZOELECTRIC UNIMORPH ACTUATORS USING PZT FILMS

FANG, HUAJUN, LIU, LITIAN, WU, XIAOMING, ZHANG, NINGXIN, REN, TIANLING
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Volume:
76
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580500413384
Date:
November, 2005
File:
PDF, 1.72 MB
english, 2005
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