Factors Affecting the Top Stripping of GaAs Microwire Array Fabricated by Inductively Coupled Plasma Etching
Cheng, Ying, Zou, Ji-Jun, Wan, Ming, Wang, Wei-Lu, Peng, Xin-Cun, Feng, Lin, Deng, Wen-Juan, Zhu, Zhi-FuVolume:
32
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/32/5/058102
Date:
May, 2015
File:
PDF, 1.54 MB
english, 2015