Low Temperature (180°C) Growth of Smooth Surface Germanium Epilayers on Silicon Substrates Using Electron Cyclotron Resonance Chemical Vapor Deposition
Chang, Teng-Hsiang, Chang, Chiao, Chu, Yen-Ho, Lee, Chien-Chieh, Chang, Jenq-Yang, Chen, I-Chen, Li, Tomi T.Volume:
2014
Year:
2014
Language:
english
Journal:
International Journal of Photoenergy
DOI:
10.1155/2014/906037
File:
PDF, 1.15 MB
english, 2014