Aluminum incorporation in Ti[sub 1−x]Al[sub x]N films studied by x-ray absorption near-edge structure
Gago, R., Redondo-Cubero, A., Endrino, J. L., Jiménez, I., Shevchenko, N.Volume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3139296
File:
PDF, 817 KB
english, 2009