![](/img/cover-not-exists.png)
Electrochemical Anodization of Silicon-on-Insulator Wafers Using an AC
Breese, M. B. H., Azimi, S., Ow, Y. S., Mangaiyarkarasi, D., Chan, T. K., Jiao, S., Dang, Z. Y., Blackwood, D. J.Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3431038
File:
PDF, 191 KB
english, 2010