Electrochemical Anodization of Silicon-on-Insulator Wafers...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 8

Electrochemical Anodization of Silicon-on-Insulator Wafers Using an AC

Breese, M. B. H., Azimi, S., Ow, Y. S., Mangaiyarkarasi, D., Chan, T. K., Jiao, S., Dang, Z. Y., Blackwood, D. J.
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3431038
File:
PDF, 191 KB
english, 2010
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