SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Gryphon M3 system: integration of MEMS for flight control

Huang, Adam, Folk, Chris, Ho, Chih-Ming, Liu, Z., Chu, Wesley W., Xu, Yong, Tai, Yu-Chong, Helvajian, Henry, Janson, Siegfried W., Laermer, Franz
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Volume:
4559
Year:
2001
Language:
english
DOI:
10.1117/12.443022
File:
PDF, 468 KB
english, 2001
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