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Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
Choi, Sungho, Jhang, Kyung-YoungVolume:
53
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.53.1.017103
Date:
January, 2014
File:
PDF, 2.99 MB
english, 2014