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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - The Impact of Carbon on the Warpage of e-SiGe Wafers During Laser Anneal
Riley, Deborah J., Bu, Haowen, Jain, Amitabh, Khamankar, RajeshVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2986791
File:
PDF, 259 KB
english, 2008