Optical Spectroscopic Analysis of ICP Nitridation for SIS...

IEEE Transactions on Appiled Superconductivity 2015 / 6 Vol. 25; Iss. 3

Optical Spectroscopic Analysis of ICP Nitridation for SIS Junctions With AlN Barriers

Cyberey, Michael E., Oakland, David, Zhang, Jian Z., Kerr, Anthony R., Pan, Shing-Kuo, Lichtenberger, Arthur W.
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Volume:
25
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/TASC.2015.2388594
Date:
June, 2015
File:
PDF, 1.00 MB
english, 2015
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