![](/img/cover-not-exists.png)
Optical Spectroscopic Analysis of ICP Nitridation for SIS Junctions With AlN Barriers
Cyberey, Michael E., Oakland, David, Zhang, Jian Z., Kerr, Anthony R., Pan, Shing-Kuo, Lichtenberger, Arthur W.Volume:
25
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/TASC.2015.2388594
Date:
June, 2015
File:
PDF, 1.00 MB
english, 2015