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Friction Characteristic of Wafer Surface in Chemical Mechanical Polishing
Jia, Zhen Yuan, Su, Jian Xiu, Jin, Zhu Ji, Guo, Dong Ming, Li, L.P.Volume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.389
File:
PDF, 209 KB
english, 2005