Numerical modeling of a MEMS actuator considering several...

COMPEL Int J for Computation and Maths in Electrical and Electronic Eng 2011 / 07 Vol. 30; Iss. 4

Numerical modeling of a MEMS actuator considering several magnetic force calculation methods

Klinkenbusch, Ludger, Preisner, Thomas, Bolzmacher, Christian, Gerber, Andreas, Bauer, Karin, Quandt, Eckhard, Mathis, Wolfgang
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Volume:
30
Language:
english
Journal:
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
DOI:
10.1108/03321641111133118
Date:
July, 2011
File:
PDF, 285 KB
english, 2011
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