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Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges
Braginsky, O, Kovalev, A, Lopaev, D, Proshina, O, Rakhimova, T, Vasilieva, A, Voloshin, D, Zyryanov, SVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/1/015201
Date:
January, 2012
File:
PDF, 1.97 MB
english, 2012