Electron energy flux control using dual power in side-type...

Electron energy flux control using dual power in side-type inductively coupled plasma

Bang, Jin-Young, Kim, Jin-Yong, Chung, Chin-Wook
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Volume:
18
Year:
2011
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3609826
File:
PDF, 729 KB
english, 2011
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