![](/img/cover-not-exists.png)
Miniaturized high-precision piezo driven two axes stepper goniometer
Zhong, H., Schwarz, A., Wiesendanger, R.Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4871994
Date:
April, 2014
File:
PDF, 1020 KB
english, 2014