RF magnetron sputtering SnO2: Sb films deposited on organic substrates
Jin Ma, Xiaotao Hao, Honglei Ma, Xiangang Xu, Yingge Yang, Shulai Huang, Deheng Zhang, Chuanfu ChengVolume:
121
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0038-1098(02)00009-1
File:
PDF, 419 KB
english, 2002