Structure and morphology of c-SiC films obtained by acetylene reaction with Si(111) surface
M. De Crescenzi, R. Bernardini, R. Gunnella, P. CastrucciVolume:
123
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0038-1098(02)00200-4
File:
PDF, 208 KB
english, 2002