![](/img/cover-not-exists.png)
[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - High Performance ALD Reactor for High-k Films
Dalton, Jeremie, Kim, Hae Young, Zhang, Zhihong, Seidel, Tom, Karim, Zia, Ramanathan, SasanganVolume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2721471
File:
PDF, 569 KB
english, 2007