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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Ge Enrichment Technique on SiGe/SOI Mesa Islands: a Localized GeOI Structures Fabrication Method
Vincent, Benjamin, Damlencourt, Jean-Francois, Morand, Yves, Rouchon, D., Mermoux, MichelVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911504
File:
PDF, 633 KB
english, 2008