Real-Time Reactive Ion Etch Metrology Techniques to Enable In Situ Response Surface Process Characterization
Klimecky, Pete, Garvin, Craig, Galarza, Cecilia G., Stutzman, Brooke S., Khargonekar, Pramod P., Terry, Fred L.Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1344537
File:
PDF, 339 KB
english, 2001