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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
Potts, Stephen E., Van den Elzen, Luc R., Dingemans, Gijs, Langereis, Erik, Keuning, Wytze, Van de Sanden, M. C., Kessels, W. M.Year:
2009
Language:
english
DOI:
10.1149/1.3205058
File:
PDF, 371 KB
english, 2009