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[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Electrical Characterization of Undoped, N- and P-Type Thermal Annealed PECVD SiC Films Deposited on Transparent Insulator Substrates
Oliveira, Alessandro R., Pereyra, Inés, Carreño, Marcelo N.Year:
2009
Language:
english
DOI:
10.1149/1.3183713
File:
PDF, 430 KB
english, 2009