Study of porous silicon, silicon carbide and DLC coated...

Solid-State Electronics 2001 Vol. 45; Iss. 6

Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application

Irina Kleps, Anca Angelescu, Narcis Samfirescu, Adriana Gil, Antonio Correia
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Volume:
45
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(01)00148-4
File:
PDF, 523 KB
english, 2001
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