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Electrical properties of SiN/GaN MIS diodes formed by ECR-CVD
Kow-Ming Chang, Chao-Chen Cheng, Chia-Ching LangVolume:
46
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(02)00085-0
File:
PDF, 106 KB
english, 2002