AlGaN/GaN HFETs fabricated on 100-mm GaN on silicon...

AlGaN/GaN HFETs fabricated on 100-mm GaN on silicon (1 1 1) substrates

J.D Brown, Ric Borges, Edwin Piner, Andrei Vescan, Sameer Singhal, Robert Therrien
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Volume:
46
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(02)00101-6
File:
PDF, 217 KB
english, 2002
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