Preparation of phosphorous dope beta-irondisilicide thin films and application for devices
Takashi Ehara, Shinji Nakagomi, Yoshihiro KokubunVolume:
47
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0038-1101(02)00219-8
File:
PDF, 102 KB
english, 2003