Effect of surface preparation on Ni Ohmic contact to 3C-SiC

Solid-State Electronics 2002 Vol. 46; Iss. 12

Effect of surface preparation on Ni Ohmic contact to 3C-SiC

Jae Il Noh, Kee Suk Nahm, Kwang Chul Kim, Michael A Capano
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Volume:
46
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(02)00233-2
File:
PDF, 424 KB
english, 2002
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