Recrystallization and dielectric properties of CaHfOx films on Si
Y.W. Kwon, D.P. Norton, G.E. Jellison Jr.Volume:
47
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(03)00188-6
File:
PDF, 379 KB
english, 2003