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ICP dry etching of ZnO and effects of hydrogen
K. Ip, M.E. Overberg, K.W. Baik, R.G. Wilson, S.O. Kucheyev, J.S. Williams, C. Jagadish, F. Ren, Y.W. Heo, D.P. Norton, J.M. Zavada, S.J. PeartonVolume:
47
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0038-1101(03)00211-9
File:
PDF, 470 KB
english, 2003