Modeling and characterization of capacitive coupling in...

Solid-State Electronics 2004 Vol. 48; Iss. 1

Modeling and characterization of capacitive coupling in trench-isolated structures on SOI substrates

Ulrich Heinle, Lars Vestling, Jörgen Olsson
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Volume:
48
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(03)00273-9
File:
PDF, 396 KB
english, 2004
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