Noncontacting photothermal radiometry of SiO2/Si MOS...

Solid-State Electronics 1997 Vol. 41; Iss. 4

Noncontacting photothermal radiometry of SiO2/Si MOS capacitor structures

A Salnick, C Jean, A Mandelis
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Volume:
41
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(96)00107-4
File:
PDF, 556 KB
english, 1997
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