Improved reliability of wet oxidized nitride MOS capacitors...

Improved reliability of wet oxidized nitride MOS capacitors in comparison to RTP N2O oxidized nitride films

Motaharul Kabir Mazumder, Kiyoteru Kobayashi, Tamotsu Ogata, Jun-Ichi Mitsuhashi, Yoji Mashiko, Satoru Kawazu, Masahiro Sekine, Hiroshi Koyama, Akihiko Yasuoka
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Volume:
41
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(96)00217-1
File:
PDF, 770 KB
english, 1997
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