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Improved reliability of wet oxidized nitride MOS capacitors in comparison to RTP N2O oxidized nitride films
Motaharul Kabir Mazumder, Kiyoteru Kobayashi, Tamotsu Ogata, Jun-Ichi Mitsuhashi, Yoji Mashiko, Satoru Kawazu, Masahiro Sekine, Hiroshi Koyama, Akihiko YasuokaVolume:
41
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(96)00217-1
File:
PDF, 770 KB
english, 1997