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Low permittivity dielectrics and global planarization for quarter-micron multilevel interconnections
Yoshio Homma, Takeshi Furusawa, Hiroyuki Morishima, Hidetada SatoVolume:
41
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(97)00014-2
File:
PDF, 655 KB
english, 1997