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Reduced plasma-induced chaging damage in SOI MOSFETs
Melanie J. Sherony, Dimitri A. Antoniadis, Ann J. Chen, Kaizad R. MistryVolume:
41
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0038-1101(97)00125-1
File:
PDF, 205 KB
english, 1997