Origin of thin-oxide defects affecting yield and reliability of floating-gate devices and flash memories
Manabu Itsumi, Hideo Akiya, Masato Tomita, Takemi Ueki, Masataka YamawakiVolume:
42
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0038-1101(97)00207-4
File:
PDF, 467 KB
english, 1998