ICP etching of SiC

J.J Wang, E.S Lambers, S.J Pearton, M Ostling, C.-M Zetterling, J.M Grow, F Ren, R.J Shul

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

Year:

1998

Language:

english

Pages:

DOI:

10.1016/s0038-1101(98)00226-3

File:

PDF, 254 KB

english, 1998

Conversion to is in progress

Conversion to is failed