Magnetron sputtering synthesis of silicon–carbon films:...

Solid-State Electronics 1998 Vol. 42; Iss. 12

Magnetron sputtering synthesis of silicon–carbon films: structural and optical characterization

S Kerdiles, R Rizk, A Pérez-Rodrı́guez, B Garrido, O González-Varona, L Calvo-Barrio, J.R Morante
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Volume:
42
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0038-1101(98)00232-9
File:
PDF, 278 KB
english, 1998
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