Effect of multiple scans and granular defects on excimer...

Effect of multiple scans and granular defects on excimer laser annealed polysilicon TFTs

Aaron M Marmorstein, Apostolos T Voutsas, Raj Solanki
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Volume:
43
Year:
1999
Language:
english
Pages:
9
DOI:
10.1016/s0038-1101(98)00249-4
File:
PDF, 431 KB
english, 1999
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