Experimental and theoretical studies of Si–CN bonds to...

Surface Science 2003 Vol. 542; Iss. 3

Experimental and theoretical studies of Si–CN bonds to eliminate interface states at Si/SiO2 interface

Osamu Maida, Akira Asano, Masao Takahashi, Hitoo Iwasa, Hikaru Kobayashi
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Volume:
542
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0039-6028(03)00985-3
File:
PDF, 241 KB
english, 2003
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