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Substrate temperature optimization for heavily-phosphorus-doped diamond films grown on vicinal (001) surfaces using high-power-density microwave-plasma chemical-vapor-deposition
Maida, Osamu, Tada, Shuhei, Nishio, Haruki, Ito, ToshimichiVolume:
424
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2015.04.037
Date:
August, 2015
File:
PDF, 699 KB
english, 2015