![](/img/cover-not-exists.png)
Miniature silicon Michelson interferometer characterization for dimensional metrology
Nouira, Hichem, Wallerand, Jean-Pierre, Malak, Maurine, Obaton, Anne-Françoise, Salgado, José, Bourouina, TarikVolume:
223
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.12.031
Date:
March, 2015
File:
PDF, 2.57 MB
english, 2015