Etching behavior of optical thin films for different...

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Thin Solid Films 2015 / 6

Etching behavior of optical thin films for different deposition techniques

Alig, Thimotheus, Günster, Stefan, Ristau, Detlev
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.06.004
Date:
June, 2015
File:
PDF, 654 KB
english, 2015
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